JPS6445171U - - Google Patents
Info
- Publication number
- JPS6445171U JPS6445171U JP13471887U JP13471887U JPS6445171U JP S6445171 U JPS6445171 U JP S6445171U JP 13471887 U JP13471887 U JP 13471887U JP 13471887 U JP13471887 U JP 13471887U JP S6445171 U JPS6445171 U JP S6445171U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- pulling
- compound semiconductor
- pressure vessel
- semiconductor single
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000005260 corrosion Methods 0.000 claims 1
- 230000007797 corrosion Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13471887U JPH052614Y2 (en]) | 1987-09-03 | 1987-09-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13471887U JPH052614Y2 (en]) | 1987-09-03 | 1987-09-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6445171U true JPS6445171U (en]) | 1989-03-17 |
JPH052614Y2 JPH052614Y2 (en]) | 1993-01-22 |
Family
ID=31393723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13471887U Expired - Lifetime JPH052614Y2 (en]) | 1987-09-03 | 1987-09-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH052614Y2 (en]) |
-
1987
- 1987-09-03 JP JP13471887U patent/JPH052614Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH052614Y2 (en]) | 1993-01-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH10158091A (ja) | 単結晶の製造装置および製造方法 | |
JPH01153590A (ja) | 真空窯内で単結晶を引き上げる際に溶融るつぼに溶融材料を連続的に供給するための装置 | |
JPS6445171U (en]) | ||
JPH0314800B2 (en]) | ||
JPS6476992A (en) | Apparatus for growing single crystal | |
JP2585276B2 (ja) | CdTe結晶の製造装置 | |
JPH01160891A (ja) | 単結晶引上装置 | |
JPS6021900A (ja) | 化合物半導体単結晶製造装置 | |
JPS6144792A (ja) | シリコン単結晶引上装置 | |
JP2785578B2 (ja) | シリコン単結晶の引上げ装置 | |
JP2706272B2 (ja) | 化合物半導体単結晶の成長方法 | |
JPH0566351B2 (en]) | ||
JPS6077195A (ja) | 3―5族化合物半導体単結晶の製造装置 | |
JPH0266680U (en]) | ||
JP2664085B2 (ja) | 化合物半導体単結晶の製造装置 | |
JPH01122995A (ja) | 化合物半導体単結晶の成長方法 | |
JPS58181792A (ja) | 単結晶シリコン引上装置 | |
JPH01246191A (ja) | 単結晶引上装置 | |
JPS623407Y2 (en]) | ||
JPH0596073U (ja) | 単結晶引き上げ用熱遮蔽体 | |
JPS57170891A (en) | Manufacture of single crystal | |
JPH0535119B2 (en]) | ||
JPS61281095A (ja) | 結晶成長用アンプル | |
JPH0416591A (ja) | 化合物半導体の単結晶引き上げ装置 | |
JPH0233270U (en]) |